DRIVER LASER FOR EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a driver laser for an extreme ultraviolet light source device for preventing the breakdown of an oscillator, and for efficiently amplifying a laser beam in a single mode excluding any high-order mode.

SOLUTION: This driver laser 1 is provided with: an oscillator 41 for oscillating and outputting a laser beam; a space filter 42 performing the space filter processing and output of the laser beam output from the oscillator 41; an amplifier 43 for amplifying and outputting the laser beam output from the space filter 42; a driving part 46 for driving the oscillator 41 and the amplifier 43; a breakdown sensor 44 for detecting the occurrence of breakdown in the space filter 42; and a control part 45 for making the driving part 46 stop the driving of the amplifier 43 when the occurrence of breakdown is detected by the breakdown sensor 44.

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