| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device that can appropriately light-shield a non-exposure region by using a light-shielding member upon carrying out pattern exposure by relatively moving a substrate and a mask. <P>SOLUTION: While exposing an exposure region, a non-exposure region can be shielded from light regardless to the number of exposure regions by moving blind members 20, 30 into an upstream side crossing the exposure light EL. As one of the blind members 20, 30 can be accelerated or decelerated while overlapping the other stationary member, influences on exposure can be suppressed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
