| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heating system capable of highly accurately controlling the temperature, capable of reducing running cost of the heating system, capable of miniaturizing the heating system, and capable of improving maintainability, while securing cleanliness in a heating furnace of the heating system. <P>SOLUTION: The heating system for manufacturing an electronic part for heating a heating object 6 in the heating furnace, is constituted by using a tube heater 1 using a gas combustion method as a base heat source, and an electric heater 2 as a temperature finely adjusting heat source. <P>COPYRIGHT: (C)2008,JPO&INPIT |
