| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately detect the state of flux transferred to a bump, using a simple and inexpensive structure. <P>SOLUTION: The apparatus comprises a coaxial irradiation device (a parallel light irradiation mechanism) 52 capable of irradiating the surface 16B having a bump 16A of a flip chip component 16 with parallel light 60 from a direction Z perpendicular to the surface 16B. The transferred state of flux is detected using the imaging information by capturing reflection light 70 from the surface 16B of the flip chip component 16, and the surface 50A of the flux 50 using a CCD camera (an imaging mechanism). <P>COPYRIGHT: (C)2008,JPO&INPIT |
