| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide module capable of avoiding damage of elements by wire bonding. <P>SOLUTION: The method includes an optical waveguide element manufacturing step including: at least a step of forming a lower part electrode layer on a substrate; a step of forming a lower part cladding layer on the lower part electrode layer; a step of forming a control electrode pattern for applying an electric field to a waveguide layer before forming the lower part cladding layer after forming the lower part electrode layer; a step of forming the waveguide layer on the lower part cladding layer; a step of forming an upper part cladding layer on the lower part cladding layer; and a step of forming the upper part cladding layer on the upper part of the waveguide layer, and includes a step of fixing the optical waveguide element manufactured through the optical waveguide element manufacturing step to a module case, and connecting the electrode pads of the module case to the control electrode pattern by wire-bonding. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
