| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To develop a clean heater, quick in a temperature rise speed, capable of stably keeping the preset temperature, and sufficiently endurable even against the large air volume, needless to say to be capable of supplying extremely clean high temperature gas of wholly eliminating mixing of contamination in jetting high temperature gas, while raising the temperature of the exhausted high temperature gas in a short time up to the desired high temperature. <P>SOLUTION: The clean heater is characterized by being composed of (a) a heating element 10 having a heating source 10a covered with a glass envelope 16 and (b) a glass outer valve 13 incorporated with the heating element 10 and having a heating object fluid supply port 11 and a high temperature gas exhaust port 12. Thus, the contamination is not mixed in a heating object fluid F1, and is exhausted from the high temperature gas exhaust port 12 by being heated in a pure state as it is. These can be suitably used in a clean environment such as a clean room. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
