DISPLAY DEVICE AND METHOD OF MAKING THE SAME

摘要

A display device includes an insulating substrate; a semiconductor layer formed on the insulating substrate and comprising silicon and fluorine; a source electrode of which at least a portion is formed on the semiconductor layer; a drain electrode of which at least a portion is formed on the semiconductor layer and which is separated from the source electrode with a channel region disposed therebetween; an ohmic contact layer formed between the semiconductor layer and the source electrode and between the semiconductor layer and the drain electrode; and an insulating layer formed on the semiconductor layer.