| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cell electrophysiologic sensor for performing high-accuracy measurement with a leak current reduced by materializing a structure of the electrophysiologic sensor excelling in productivity, and its manufacturing method. <P>SOLUTION: In this cell electrophysiologic sensor, a well 1 having a first through hole 5 therethrough, a holding plate 2, and a flow-path plate 3 having a hollow 8 therein, are layeredly put into contact with each other, and a sensor chip 4 put into contact therewith, the sensor chip 4 comprising a diaphragm 9 equipped with a third through hole 7 within a second through hole 6. The sensor chip 4 is made by joining a chip part 4a made of silicon to a chip holding part 4b made of hydrophilic glass by glass welding. <P>COPYRIGHT: (C)2008,JPO&INPIT |
