| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro sensor capable of suppressing fluctuation of an output characteristic of a vibration element caused by a stress change inside the sensor at a reflow mounting time. <P>SOLUTION: The vibration gyro sensor 10 is constituted so that the vibration element 1 (1X, 1Y) is mounted on a relay substrate 4 through a support substrate 2, and thereby the vibration element 1 is independent of mounting surfaces of circuit components 7, 8 mounted on the relay substrate 4 by solder bonding, and a change of a vibration characteristic of the vibration element 1 is prevented from fluctuation of a stress distribution in the relay substrate 4 at the reflow mounting time of the sensor 10 on an assembled substrate 9. Hereby, the change of the vibration characteristic of the vibration element 1 before and after mounting of the vibration type gyro sensor 10 on the assembled substrate 9 can be suppressed, and an electric characteristic of the vibration element 1 set before mounting can be maintained stably. <P>COPYRIGHT: (C)2008,JPO&INPIT |
