发明名称 |
PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING |
摘要 |
The present invention includes a method of fabricating organic/inorganic composite nanostructures on a substrate comprising depositing a solution having a block copolymer and an inorganic precursor on the substrate using dip pen nanolithography. The nanostructures comprises arrays of lines and/or dots having widths/diameters less than 1 micron. The present invention also includes a device comprising an organic/inorganic composite nanoscale region chemically bonded to a substrate, wherein the nanoscale region, wherein the nanoscale region has a nanometer scale dimension other than height.
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申请公布号 |
US2008044575(A1) |
申请公布日期 |
2008.02.21 |
申请号 |
US20070847263 |
申请日期 |
2007.08.29 |
申请人 |
NORTHWESTERN UNIVERSITY |
发明人 |
MIRKIN CHAD A.;DRAVID VINAYAK P.;SU MING;LIU XIAOGANG |
分类号 |
B05D5/00;B82B3/00;G03F7/00;H01L21/027 |
主分类号 |
B05D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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