发明名称 Film forming method, discharging droplet method and droplet discharging device
摘要 The present invention provides film forming method and a droplet discharge method for removing bubbles in a pressurizing chamber to prevent defective discharge without disposing a large amount of materials in a droplet discharging device. Before a material is discharged in the droplet discharging device, a step is provided in which reduced pressure is kept in a pressurizing chamber and a material supply portion, which are connected, to remove bubbles that exist in the pressurizing chamber. A flow path connected to the outside such as an opening of a nozzle surface of the pressurizing chamber or a material supply port of the material supply portion is sealed, and pressure in the pressurizing chamber and the material supply portion is reduced from an inlet and outlet connected to the material supply portion with the use of a reduced pressure means such as a pump.
申请公布号 US2008041973(A1) 申请公布日期 2008.02.21
申请号 US20070889683 申请日期 2007.08.15
申请人 FUJII GEN 发明人 FUJII GEN
分类号 B05B7/32 主分类号 B05B7/32
代理机构 代理人
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