| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device capable of inexpensively preventing tarnish of an optical element; and an inspection device. <P>SOLUTION: This light source device is provided with: a light source 11 emitting light with heat radiation; the optical element 13 condensing the light from the light source; and a heat insulation member 12 arranged between the light source and the optical element, transmitting the light from the light source, and keeping the temperature of the optical element set at a high temperature by receiving the heat radiation of the light source. <P>COPYRIGHT: (C)2008,JPO&INPIT |
