| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polymer which can exhibit a designed performance in an objective use, to provide a method for producing the same, and to provide a resist composition which can make a resist film to exhibit a designed performance and can inhibit defects in a resist pattern. <P>SOLUTION: A container having a difference (X-Y) of ≤18 μS/cm between the electric conductivity (X) of water after container charging and the electric conductivity (Y) of water before container charging is used as each container (preparation tank 10, polymerization tank 20 or purification tank 30) used for producing the polymer. Pure water having an electric conductivity of ≤0.5 μS/cm is used as the water before the container charging, and the electric conductivity of the water after the container charging is an electric conductivity of the water in the container, obtained by charging a prescribed amount of pure water in the container, stirring for one hour after the finish of the charging, and then measuring the electric conductivity. <P>COPYRIGHT: (C)2008,JPO&INPIT |
