| 摘要 |
PROBLEM TO BE SOLVED: To provide an angle correction method of an X-ray diffraction measuring method which enables a more accurate correction of the machine error of a goniometer than before. SOLUTION: The intensity (I<SB>R</SB>) of a diffraction line at every angle (2θ) of diffraction is measured in relation to a standard sample, an error (Δ2θ) at every angle (2θ) of diffraction is calculated from the comparison of the intensity (I<SB>R</SB>) of the diffraction line with the intensity (I<SB>Rtru</SB>) of the real value of the standard sample, the error (Δ2θ) and a system error (Δ2θ<SB>0</SB>) are substituted for the formula:Δ2θ<SB>m</SB>=Δ2θ-Δ2θ<SB>0</SB>to calculate the machine error (Δ2θ<SB>m</SB>) at every angle (2θ) of diffraction, the intensity (I) of the diffraction line at every angle (2θ) of diffraction is measured in relation to a measuring sample, the angle (2θ) of diffraction and the machine error (Δ2θ<SB>m</SB>) calculated in relation to the measuring sample is substituted for the formula: 2θ<SB>K</SB>=2θ+Δ2θ<SB>m</SB>to calculate the calibrated angle (2θ<SB>K</SB>) of diffraction. Then, an equal interval angle (2θ<SB>T</SB>) of diffraction is set on the basis of the calibrated angle (2θ<SB>K</SB>) of diffraction and the intensity (I) of the diffraction line of the measuring sample is distributed to the equal interval angle (2θ<SB>T</SB>) of diffraction at a predetermined distribution ratio. COPYRIGHT: (C)2008,JPO&INPIT
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