| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal laser scanning microscope capable of obtaining high detection accuracy and high focus detecting sensitivity related to a sample, without being affected by a pupil diameter difference between objective lenses having different magnification. SOLUTION: The confocal laser scanning microscope includes: a laser light source 1; a polarized beam splitter (PBS) 3; a plurality of beam expanders 17; a two-dimensional scanning mechanism 4; a pupil projection lens 5; an image forming lens 6; a 1/4 wavelength plate 7; an objective 9; a stage 12; an image forming lens 13; a pinhole 14; and an optical detector 15. The beam expander 17 is configured to change the beam diameter of the incident laser beam 2 to substantially the same as the diameter of the pupil 8 of the objective 9 arranged on the optical path. COPYRIGHT: (C)2008,JPO&INPIT
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