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发明名称
VERFAHREN UND APPARAT ZUM TROCKNEN VON HALBLEITERSCHEIBENOBERFLÄCHEN MITTELS EINER VIELZAHL VON EIN- UND AUSLÄSSEN IN DER NÄHE DER SCHEIBENOBERFLÄCHE
摘要
申请公布号
DE60314508(T2)
申请公布日期
2008.02.21
申请号
DE20036014508T
申请日期
2003.09.30
申请人
LAM RESEARCH CORP.
发明人
DE LARIOS, JOHN M.;GARCIA, JAMES P.;WOODS, CARL;RAVKIN, MIKE;REDEKER, FRITZ;BOYD, JOHN;NICKHOU, AFSHIN
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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