发明名称 METHOD OF MANUFACTURING ELECTROOPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electrooptical device capable of displaying an image of high quality. SOLUTION: The method of manufacturing the electrooptical device includes the steps of: forming a transistor including a semiconductor layer 1a having a first junction region and a second junction region 1c on a substrate 10; laminating an interlayer dielectric 41 above the semiconductor layer; and etching the interlayer dielectric to bore a contact hole for electrically connecting a storage capacitor 70 to a pixel-electrode-line-side source/drain region of the semiconductor layer and also dig a lengthwise groove 810 along the second junction region. Further, the method includes a stage of forming the storage capacitor on the interlayer dielectric so that the storage capacitor partially overlaps with the semiconductor layer and is electrically connected to the pixel-electrode-line-side source/drain region through the contact hole, and also has an in-groove part 70t overlapping the groove. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008040398(A) 申请公布日期 2008.02.21
申请号 JP20060217968 申请日期 2006.08.10
申请人 SEIKO EPSON CORP 发明人 ISHII TATSUYA;YASUKAWA MASAHIRO
分类号 G09F9/30;G02F1/1368 主分类号 G09F9/30
代理机构 代理人
主权项
地址