| 摘要 |
PROBLEM TO BE SOLVED: To establish a high speed operation and deflection capability in a range necessary for an electronic beam exposure apparatus, concerning a transmission line type blanking device and an electronic beam exposure apparatus. SOLUTION: A primary section for adding a deflection electric field to an electronic beam 5 of a pair of blanking electrodes 1 and 2 forming a transmission line whose characteristic impedance is uniform is shaped so that a direction following the electronic beam 5 can become a longitudinal direction, and a power source 4 and a termination resistance 3 are arranged so that a deflection electromagnetic field traveling in the transmission line can travel in anti-parallel oppositely to the traveling direction of the electronic beam 5. COPYRIGHT: (C)2008,JPO&INPIT
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