摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an ultrasonic probe in which an organic piezoelectric element having no variation in composition, increasing physical properties, excellent in piezoelectric performance, and being highly sensitive can be easily manufactured and managed, manufacturing quality is stabilized, high yield, cheap price and easy manufacturing can be achieved by considering vapor deposition polymerization using an oligomer, regarding vapor deposition polymerization conventionally related to more than two kinds of monomers. <P>SOLUTION: The method for manufacturing the ultrasonic probe is characterized in that a high-polymer precursor for giving piezoelectric is polymerized while being subjected to evaporation by heating and collided with a substrate, and, the organic piezoelectric element is manufactured. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |