| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized highly-accurate frequency detection type pressure detection device having a non-dispersed characteristic. SOLUTION: This pressure detection device has structure wherein a capacity changing type pressure sensor 30 and a piezoelectric vibrator (piezoelectric vibration chip) 21 selected so that each characteristic are fitted to each other are stored in a package equipped with a plurality of cavities 15, 16 for storing them individually respectively, and connected in parallel. The device has a configuration wherein a capacity of the capacity changing type pressure sensor 30 is changed corresponding to a change of an applied pressure, and thereby a resonance frequency or an antiresonance frequency of the piezoelectric vibrator 21 is changed, and the pressure change is detected based on this phenomenon. COPYRIGHT: (C)2008,JPO&INPIT
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