| 摘要 |
PROBLEM TO BE SOLVED: To perform a quantitative analysis using an HF furnace type carbon densitometor and to sharply enhance the treatment speed of quantitative analysis even if both of an ER furnace carbon densitometor and the HF furnace type carbon densitometor are used. SOLUTION: The mass of silicon carbide containing free carbon is measured before heating and the silicon carbide containing free carbon is heated at a predetermined temperature using a muffle furnace for a predetermined time. Thereafter, the masses of the silicon carbide after heating and the mass of silicon oxide are measured and both of silicon carbide and silicon oxide are succeedingly charged in an HF furnace 51 and combusted to measure the concentration of carbon after combustion. The content of free carbon is calculated by substituting masses before and after measurement and the concentration of carbon for a model formula led out on the basis the first reaction equation obtained in the case where silicon carbide containing free carbon is heated and the second reaction equation obtained in the case where silicon carbide and silicon oxide after heating are combusted. COPYRIGHT: (C)2008,JPO&INPIT
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