| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measuring device and a film thickness measuring method which accurately measures the film thickness of a magnetic film even when a magnetic tape running among rolls wobbles. SOLUTION: Primary X-rays x<SB>1</SB>are irradiated with a predetermined incident angle from an X-ray tube 4 arranged on the surface side of the magnetic tape T, and the intensity of fluorescence X-rays f<SB>1</SB>generated from a target element in the magnetic film 3 is detected by a semiconductor detector 11 arranged in the reflection angle corresponding to the incident angle. Primary X-rays x<SB>2</SB>are irradiated with an X-ray tube 5 opposing the X-ray tube 4 on the surface side being arranged on the rear side of the magnetic tape T, and the intensity of fluorescence X-rays f<SB>2</SB>generated from the target element is detected by a semiconductor detector 12 arranged opposing the semiconductor detector 11 on the surface side. Even when the magnetic tape T wobbles, the total value of a count value of the intensity of the fluorescence X-ray f<SB>1</SB>detected by the semiconductor detector 11 and a count value of the intensity of the fluorescence X-ray f<SB>2</SB>detected by the semiconductor detector 12, provides the exact film thickness of the magnetic layer 3. COPYRIGHT: (C)2008,JPO&INPIT
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