发明名称 Temperature sensor, temperature control device, temperature controller and temperature-control method
摘要 A temperature sensor ( 10 ) includes: a temperature-sensing portion for measuring a temperature of an object ( 50 ) by contacting the object; and a supporting portion for supporting the temperature-sensing portion from a side opposite to a contact surface, the supporting portion having a space at a portion partially corresponding to the temperature-sensing portion. A temperature controller includes: a temperature control device; the temperature sensor ( 10 ) for measuring the temperature by contacting the object ( 50 ); and a controller for controlling the temperature control device. The controller includes: a mounting-state judging means for judging a mounting-state of the object ( 50 ); a switching means for switching a control gain and a target temperature of the temperature control device based on the judging result; and a control-command generating means for generating a control command based on the control gain, the target temperature and a measurement value of the temperature sensor ( 10 ).
申请公布号 US2008043803(A1) 申请公布日期 2008.02.21
申请号 US20070825065 申请日期 2007.07.03
申请人 KOMATSU LTD. 发明人 BANDOH KENICHI
分类号 H01L21/66;G01K1/00 主分类号 H01L21/66
代理机构 代理人
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