| 摘要 |
A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft. In accordance with other aspects of the disclosure methods and systems for micro transmissions for micro machines may be provided. Micro machines may include micro structures configured to move into engagement with other micro structures. A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the shaft. For example micro machines may include micro rotary machines and micro transport machines. |
