| 摘要 |
PROBLEM TO BE SOLVED: To enhance electric reliability at low cost in high density mounting. SOLUTION: A top plate 26 is placed on a partition wall layer 25 forming a partition wall at a periphery of an acting section 58 of a piezoelectric element 24. A through-hole 261 for supplying a liquid to a pressurizing chamber 52 from a common liquid chamber 55, a through-hole 262 for connecting a wire to an upper electrode 57 of the piezoelectric element 24 from the top face of the top plate 26, a filling connection section 31 connected to the upper electrode 57 of the piezoelectric element 24, the filling connection section 31 constituted such that the through-hole 262 is filled with a conductive material, and an upper connection electrode 32 connected to the filling connection section 31 are formed on the top plate 26. The plurality of acting sections 58 of the piezoelectric elements 24 are two-dimensionally arranged in the line and column directions. A lower electrode 56 of the piezoelectric elements 24 is formed to be common to the plurality of acting sections 58 in the line direction, and the upper connection electrode 32 is provided to be common to the plurality of acting sections 58 in the column direction. The filling connection section 31 and the upper connection electrode 32 of the top plate 26 are integrally formed of an identical conductive material. COPYRIGHT: (C)2008,JPO&INPIT |
