发明名称 CABLE CONNECTION, CONTROL SYSTEM FOR IT, AND METHOD FOR REDUCING VIBRATION TRANSMITTED VIA CABLE CONNECTION FROM FIRST OBJECT TO SECOND OBJECT
摘要 <P>PROBLEM TO BE SOLVED: To provide cable connection between a first object and a second object, in which vibration propagated or transmitted from the first object to the second object is reduced. <P>SOLUTION: The cable connection between the first object and the second object includes a cable bundle containing one or more cables, one end of which is fixed to the first object and the other end of which is fixed to the second object; a cable bundle holder configured so as to hold the cable bundle at a position along the length of the cable bundle;a control system configured so as to control a position of the cable bundle holder with respect to the second object. A control system for the cable connection, and a method for reducing vibration transmitted via the cable connection from the first object to the second object. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008042201(A) 申请公布日期 2008.02.21
申请号 JP20070200649 申请日期 2007.08.01
申请人 ASML NETHERLANDS BV 发明人 BUTLER HANS;VAN DUIJNHOVEN MARTINUS;GEERKE JOHAN HENDRIK;DE PEE JOOST;DE HOON CORNELIUS ADRIANUS LAMBERTUS
分类号 H01L21/027;H01L21/68 主分类号 H01L21/027
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