LASER BEAM MACHINING METHOD AND LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus capable of performing the laser beam machining of a workpiece even when a surface of the workpiece is uneven.

SOLUTION: Laser beams output from one light source 11 is reflected by a mirror 25, condensed by a lens 31 and radiated to an upper surface of a workpiece 90. Laser beams output from other light source 12 are reflected by a mirror 26, condensed by a lens 32 and radiated to the upper surface of the workpiece 90. The radiating direction of laser beams to the surface of the workpiece 90 by a first radiation optical system including the lens 31 and the radiating direction of laser beams to the surface of the workpiece 90 by a second radiation optical system including the lens 32 are different from the normal direction to the surface of the workpiece 90, and opposite to each other across the normal direction.

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