| 摘要 |
PROBLEM TO BE SOLVED: To improve structural stability of carbon wiring applied to LSI and to improve compatibility with a surface flattening processing in an LSI process. SOLUTION: An LSI carbon wiring structure is provided with a first conductor (11) and a second conductor (13) positioning through an interlayer insulating film, and carbon wiring (20) which is electrically connected to the first conductor and the second conductor. Carbon wiring comprises a plurality of carbon fibers (21) extending between the first conductor and the second conductor, and a resin layer (22) with which a part between the carbon fibers is filled. COPYRIGHT: (C)2008,JPO&INPIT
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