| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor having satisfactory responsiveness and satisfactory detection sensitivity from the time of application of acceleration to the time of detection by a detection element. SOLUTION: The acceleration sensor comprises both a cantilever 12 in which a beam part 18 having a wall thickness thinner than those of a fixed end 16 and a free end 14 is formed between the fixed end 16 and the free end 14 and a turning-form-type piezoelectric oscillation reed 22 capable of converting stress exerted when the beam part 18 is bent into electric signals and outputting them. Base parts 26 and 24 of the turning-form-type piezoelectric oscillation reed 22 are each fixed to the fixed end 16 and the free end 14. A gap is provided between the turning-form-type piezoelectric oscillation reed 22 and the beam part 18. The beam part 18 is formed in a flat plate shape and provided with a groove 20 along the direction of its width. COPYRIGHT: (C)2008,JPO&INPIT
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