| 摘要 |
PROBLEM TO BE SOLVED: To provide a force sensor chip which allows noise occurred to be canceled by output calculations, reduce drift noise, and perform stable force/moment detection. SOLUTION: The force sensor chip 1 comprises an application section 3 having an external force application area section 3a, a support section 4 for supporting the application section 3, and a connection section 5 for connecting the application section and the support section. The connection section 5 comprises: a semiconductor substrate 2 comprising circular intermediate sections (5A, 5B) arranged on the periphery of the application section, a first connecting arm section 51 for connecting the application section and the circular intermediate sections, and a second connecting arm section 52 for connecting the support section and the circular intermediate sections; and strain resistance elements Sxa1 to Sxa3, Sya1 to Sya3, Sxb1 to Sxb3, and Syb1 to Syb3 provided on deformation generation sections of the first connecting arm section and the second connecting arm section, respectively, of the connecting section. COPYRIGHT: (C)2008,JPO&INPIT
|
