发明名称 Method for manufacturing contact structure of pixel electrode of liquid crystal display device
摘要 A method for manufacturing a pixel electrode contact structure of a thin-film transistors liquid crystal display is disclosed. First, a transparent substrate having a first insulating layer thereon is provided. Afterward, a first metal layer and a second metal layer are sequentially formed on the substrate and then be patterned by a halftone technology and an etching process, wherein the second metal layer is removed within the pixel electrode contact area. In the meantime, the drain lines of the thin-film transistor comprising the first metal layer and the second metal layer are formed. Next, a patterned passivation layer is formed on the substrate. Finally, a pixel electrode layer directly connecting the first metal layers within the pixel electrode contact structure is formed on the substrate. This invention provides the pixel electrode contact structure with low contact resistance and prevents the current leakage from the drain line to the storage capacitor.
申请公布号 US2008044935(A1) 申请公布日期 2008.02.21
申请号 US20070976222 申请日期 2007.10.23
申请人 QUANTA DISPLAY INC. 发明人 SHYU WEN-YI
分类号 H01L21/64 主分类号 H01L21/64
代理机构 代理人
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