发明名称 Printed dopant layers
摘要 A method for making an electronic device, such as a MOS transistor, including the steps of forming a plurality of semiconductor islands on an electrically functional substrate, printing a first dielectric layer on or over a first subset of the semiconductor islands and optionally a second dielectric layer on or over a second subset of the semiconductor islands, and annealing. The first dielectric layer contains a first dopant, and the (optional) second dielectric layer contains a second dopant different from the first dopant. The dielectric layer(s), semiconductor islands and substrate are annealed sufficiently to diffuse the first dopant into the first subset of semiconductor islands and, when present, the second dopant into the second subset of semiconductor islands.
申请公布号 US2008044964(A1) 申请公布日期 2008.02.21
申请号 US20070888949 申请日期 2007.08.03
申请人 KOVIO, INC. 发明人 KAMATH ARVIND;CLEEVES JAMES M.;ROCKENBERGER JOERG;SMITH PATRICK;ZURCHER FABIO
分类号 H01L21/00;H01L21/311 主分类号 H01L21/00
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