| 摘要 |
A high-recording-density magnetic recording medium and a method of its manufacture can achieve a high OR with only a small reduction in Hcr. The magnetic recording medium has a nonmagnetic substrate and a first seed layer, a second seed layer, a first underlayer, a second underlayer, and a magnetic recording layer formed on the substrate in this order. The first seed layer can be a single layer or a plurality of layers made of at least one material selected from the group consisting of Ni-Ti alloys, Cr-Al alloys, Cr-Ta alloys, and Cr-Ti alloys. The second seed layer can be a single layer or a plurality of layers made of at least one material selected from the group consisting of Ni-W alloys, Ni-Ru-W alloys, and Co-W alloys. The first underlayer can be a single layer or a plurality of layers made of a Cr-Ru alloy. The second underlayer can be a single layer or a plurality of layers made of a Cr alloy comprising Cr and at least one element selected from the group consisting of Mo, B, Ti, and W. The second seed layer is formed by sputtering while applying a substrate bias voltage to the substrate. The surface of the second seed layer can be subject to a plasma processing or exposed to an oxygen-containing atmosphere or both.
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