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发明名称
TIEFULTRAVIOLETTES KATADIOPTRISCHES ANAMORPHISCHES TELESKOP
摘要
申请公布号
DE60037754(D1)
申请公布日期
2008.02.21
申请号
DE2000637754
申请日期
2000.11.15
申请人
CYMER INC.
发明人
SMITH, SCOTT T.
分类号
G02B13/08;H01S3/08;G02B13/14;G02B17/08;G02B27/09;G03F7/20;H01S3/00;H01S3/10;H01S3/225
主分类号
G02B13/08
代理机构
代理人
主权项
地址
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