发明名称 |
Resonator and fabrication method thereof |
摘要 |
A resonator including a substrate, and a resonating unit having an active region that causes resonances and a non-active region that does not cause resonances, and having a first electrode, a piezoelectric film, and a second electrode layered in turn on the substrate. At least one of the first and the second electrodes is formed, so that at least a portion of a non-active region portion thereof has a thickness different from that of an active region portion thereof. |
申请公布号 |
EP1890380(A1) |
申请公布日期 |
2008.02.20 |
申请号 |
EP20070113055 |
申请日期 |
2007.07.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JOO-HO;PARK, HAE-SEOK;LEE, SANG-HUN;KIM, DUCK-HWAN;SUL, SANG-CHUL |
分类号 |
H03H9/17;H01L41/09;H01L41/18;H01L41/22;H01L41/29;H03H3/02;H03H9/02 |
主分类号 |
H03H9/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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