CROSS-QUAD AND VERTICALLY COUPLED INERTIAL SENSORS

摘要

An inertial sensor includes a cross-quad configuration of four interconnected sensor elements. Each sensor element has a frame and a resonator suspended within the frame. The sensor elements are arranged so that the frames of adjacent sensor elements are allowed to move in anti-phase to one another but are substantially prevented from moving in phase with one another. The sensor elements may be configured in a horizontally coupled arrangement, a vertically coupled arrangement, or a fully coupled arrangement. A pair of sensor elements may be vertically coupled.