发明名称 Interferometer apparatus and interferometric method
摘要 <p>An interferometer apparatus comprises an optical delay section including a light input, a light output, at least two beam splitters disposed in an optical path between the light input and the light output and arranged to provide at least three optical path lengths to the light traversing the optical delay apparatus. An interferometric method comprises directing a beam of measuring light into an optical cavity such that a first portion of the beam of measuring light interacts with an optical element and such that a second portion of the beam of measuring light bypasses the optical element.</p>
申请公布号 EP1890105(A1) 申请公布日期 2008.02.20
申请号 EP20060016939 申请日期 2006.08.14
申请人 CARL ZEISS SMT AG 发明人 ALTENBERGER, MICHAEL
分类号 G01B9/02 主分类号 G01B9/02
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