Method of making semiconductor devices in a semiconductor substrate,申请号EP20040022112-传众专利搜索

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发明名称	Method of making semiconductor devices in a semiconductor substrate
摘要
申请公布号	EP1517362(B1)	申请公布日期	2008.02.20
申请号	EP20040022112	申请日期	2004.09.17
申请人	ATMEL GERMANY GMBH	发明人	DIETZ, FRANZ, DIPL.-ING.;DUDEK, VOLKER, DR.;GRAF, MICHAEL, DR.
分类号	H01L21/336;H01L21/225;H01L21/265;H01L21/76;H01L21/762;H01L21/8238;H01L27/08;H01L29/08;H01L29/10;H01L29/78;H01L29/786	主分类号	H01L21/336
代理机构		代理人
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