GATE VALVE FOR SEMICONDUCTOR AND LCD VACUUM EQUIPMENT

摘要

A gate valve for a semiconductor and LCD vacuum equipment is provided to extend a lifespan by minimizing the contact between components and corrosive fluid when the gate valve is opened or closed. A body(112) has a first chamber connected to an inlet pipe and an outlet pipe, and a second chamber connected to the first chamber. A driving unit(140) is engaged to an outer side of the body, and has a cylinder rod with a pneumatic cylinder(158) extending inwardly from the body. A gate is disposed in the body and is connected to the cylinder rod. The gate has first and second blocking discs which are disposed in the second chamber at opening of the valve and are disposed in the first chamber at blocking of the valve to block the inlet pipe and the outlet pipe. A protective plate interrupts contact between the first and second blocking discs and corrosive fluid.