Semiconductor power device with charge compensation structure and monolithic integrated circuit, and method for fabricating it

摘要

The invention relates to a semiconductor power device with charge compensation structure and monolithic integrated circuit, and method for fabricating it. In the case of this semiconductor power device, zones ( 6 ) in charge compensation cells ( 27 ) that are arranged vertically and doped complimentarily to the semiconductor chip volume ( 5 ) are arranged in the entire chip volume, the complimentarily doped zones ( 6 ) extending right into surface regions ( 11 ) of the semiconductor power elements ( 7 ) and not projecting into surface regions ( 12 ) of semiconductor surface elements ( 1 ).