| 摘要 |
<p>A crack forming method capable of forming a crack in an accurate direction even if displacement occurs when a large-sized brittle material substrate is positioned on a loading table for processing and a crack forming device. In the method, a beam spot (B) is moved relative to the substrate (G) under the condition that the direction of a beam running line (L) which is the route of the movement center of the beam spot is tilted to a reference axis direction (X) determined to match the substantial major axis direction of the beam spot (B) to form a predicted crack formation line (M) at a position apart an offset amount (O) from the beam running line (L). Then, a cooling spot (C) is moved relative to the substrate along the predicted crack formation line (M) to form the vertical crack along the predicted crack formation line (M).</p> |
