发明名称 Method for manufacturing wiring, thin film transistor, light emitting device and liquid crystal display device, and droplet discharge apparatus for forming the same
摘要 As a semiconductor device, specifically, a pixel portion included in a semiconductor device is made to have higher precision and higher aperture ratio, it is required to form a smaller wiring in width. In the case of forming a wiring by using an ink-jet method, a dot spreads on a wiring formation surface, and it is difficult to narrow width of a wiring. In the present invention, a photocatalytic substance typified by TiO<SUB>2 </SUB>is formed on a wiring formation surface, and a wiring is formed by utilizing photocatalytic activity of the photocatalytic substance. According to the present invention, a narrower wiring, that is, a smaller wiring in width than a diameter of a dot formed by an ink-jet method can be formed.
申请公布号 US7332432(B2) 申请公布日期 2008.02.19
申请号 US20040946649 申请日期 2004.09.22
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 NAKAMURA OSAMU;OGINO KIYOFUMI
分类号 G02F1/1368;H01L21/44;B01J35/02;B05D3/00;B05D5/12;C08J7/18;G21H1/00;H01L21/027;H01L21/28;H01L21/288;H01L21/3205;H01L21/336;H01L21/768;H01L27/32;H01L29/786;H01L51/00;H01L51/56 主分类号 G02F1/1368
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