发明名称 Semiconductor device having a recessed gate and asymmetric dopant regions and method of manufacturing the same
摘要 A semiconductor device, having a recessed gate and asymmetric dopant regions, comprises a semiconductor substrate having a trench with a first sidewall and a second sidewall, the heights of which are different from each other, a gate insulating layer pattern disposed on the semiconductor substrate, a gate stack disposed on the semiconductor such that the gate stack protrudes from the surface of the semiconductor substrate while the gate stack fills the trench, and first and second dopant regions disposed at the upper part of the semiconductor substrate adjacent to the first and second sidewalls of the trench, respectively, such that the first and second dopant regions have different steps.
申请公布号 US7332772(B2) 申请公布日期 2008.02.19
申请号 US20050292381 申请日期 2005.11.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 ROUH KYOUNG BONG;SEUNG SEUNG WOO;LEE MIN YONG
分类号 H01L29/76 主分类号 H01L29/76
代理机构 代理人
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