Photoelectric encoder, scale therefor and method for manufacturing the same

摘要

A main scale 10 has protrusive grating 12 of a thin film of e.g. Cr formed on a base member 11 . The base member 11 and the Cr thin film constitute a reflecting face which is set to provide the sufficient quantity of received light on a light receiving side. The protrusive grating 12 can be formed accurately by photo-etching the thin film.