发明名称 Technique for forming a substrate having crystalline semiconductor regions of different characteristics
摘要 Different types of crystalline semiconductor regions are provided on a single substrate by forming a dielectric region within a first crystalline semiconductor region. Thereafter, a second crystalline region is positioned above the dielectric region by wafer bond techniques. In preferred embodiments, isolation structures may be formed in the first crystalline region along with the dielectric region. In particular, crystalline semiconductor regions of different crystallographic orientations may be formed, wherein a high degree of flexibility and compatibility with currently used CMOS processes is maintained.
申请公布号 US7332384(B2) 申请公布日期 2008.02.19
申请号 US20050099761 申请日期 2005.04.06
申请人 ADVANCED MICRO DEVICES, INC. 发明人 BUCHHOLTZ WOLFGANG;KRUEGEL STEPHAN
分类号 H01L21/84 主分类号 H01L21/84
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