| 摘要 |
A capacitive humidity sensor includes: a humidity sensing element; a substrate; and an insulation film. The humidity sensing element includes a pair of comb-shape electrodes and a humidity sensitive film. The comb-shape electrodes are surrounded by a dam provided by a part of the insulation film. The insulation film on the comb-shape electrodes has a first height. The part of the insulation film on the dam has a second height higher than the first height. The humidity sensitive film has a height equal to or lower than the second height, and is disposed inside of the dam. The dam further includes a first ring pattern made of a same material as the comb-shape electrodes.
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