METHOD FOR FABRICATING PERIODIC ZINC OXIDE NANOROD ARRAYS

摘要

A method for fabricating a zinc oxide nanorod array having a periodic pattern is provided to fabricate an inexpensive zinc oxide nanorod array at a low temperature by using a hydrothermal synthesis method and an anodic aluminum nano pattern. An ultrasonic cleaning process can be performed on a substrate(110) wherein acetone, methanol, isopropyl alcohol and deionized water are sequentially used. A silicon oxide layer having a nano pattern is formed on a substrate by using an aluminum anodization process. The substrate is disposed in a solution for hydrothermal synthesis in which a zinc source is melted. A zinc oxide nanorod array(150) is formed on the substrate by performing a hydrothermal synthesis process on the solution for hydrothermal synthesis. The process for forming the silicon oxide layer having the nano pattern includes the following steps. A silicon oxide layer having the nano pattern is formed. An aluminum layer is deposited on the silicon oxide layer. An aluminum anodization process is performed on the aluminum layer to form an aluminum oxide layer made of a porous nano pattern. The silicon oxide layer is etched by using the porous nano pattern formed in the aluminum oxide layer. The aluminum oxide layer is removed.