| 发明名称 |
LIQUID FOR IMMERSION EXPOSURE, METHOD FOR PURIFYING LIQUID FOR IMMERSION EXPOSURE, AND IMMERSION EXPOSURE METHOD |
| 摘要 |
<p>A liquid for immersion exposure containing a saturated hydrocarbon compound having a purity of not less than 99.5% by weight is obtained by bringing a saturated hydrocarbon compound into contact with at least a first and a second adsorbent.</p> |
| 申请公布号 |
KR20080014976(A) |
申请公布日期 |
2008.02.15 |
| 申请号 |
KR20077027326 |
申请日期 |
2007.11.23 |
| 申请人 |
MITSUI CHEMICALS, INC. |
发明人 |
KAGAYAMA AKIFUMI;NAKANO TAKASHI;TAMATANI HIROAKI;NAKAYAMA NORIO |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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