| 摘要 |
The invention relates to a method for contactlessly inspecting a strip conductor structure (120), which is formed on a flat support (110), during which an electrode (130) is positioned at a predetermined distance from the strip conductor structure (120) by means of a positioning device (135), and an electric voltage is applied between the electrode (130) and the strip conductor structure (120). The electrode (130) is moved in a plane parallel to the support (110) during which a recharge current flow (I) through an electric line (160, 260, 360) connected to the electrode (130, 230, 330) is measured at least at selected positions. The local voltage state in a partial area of the strip conductor structure (120) is detected from the strength of the recharge current flow (I). This voltage state can be used for determining the quality of the strip conductor structure (120). This makes it possible to identify defects, such as short circuits, constrictions or line breaks, caused by geometric changes in the strip conductor structure. |
