发明名称 DRAWING METHOD AND DEVICE
摘要 A method and a device for exposing an image on an exposure plane by moving a plurality of exposure heads relatively to a the exposure plane in a predetermined scanning direction in which the image is exposed appropriately without causing any deviation of images between the exposure heads. Reference points (rp21, rp12) for respective exposure heads (3021, 3012) are formed on the exposure plane by using reference micromirrors (r21, r12) preset for the respective exposure heads (3021, 3012), and exposure timing by the respective exposure heads (2021, 3012) is controlled such that the reference points (rp21, rp12) for the respective exposure heads (3021, 3012) are arranged on a reference line (RL).
申请公布号 KR20080014983(A) 申请公布日期 2008.02.15
申请号 KR20077028097 申请日期 2007.11.30
申请人 FUJI FILM CORPORATION 发明人 SUMI KATSUTO;KOWADA KAZUTERU;SUZUKI ISSEI;FUKUI TAKASHI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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